A stacked capacitor technology with ECR plasma MOCVD...
Autor: | Yamamichi, Shintaro, Lesaicherre, Pierre-Yves |
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Zdroj: | IEEE Transactions on Electron Devices. July97, Vol. 44 Issue 7, p1076. 8p. 2 Black and White Photographs, 2 Diagrams, 6 Graphs. |
Databáze: | Business Source Ultimate |
Externí odkaz: |