A stacked capacitor technology with ECR plasma MOCVD...

Autor: Yamamichi, Shintaro, Lesaicherre, Pierre-Yves
Zdroj: IEEE Transactions on Electron Devices. July97, Vol. 44 Issue 7, p1076. 8p. 2 Black and White Photographs, 2 Diagrams, 6 Graphs.
Databáze: Business Source Ultimate