Polysilicon RTCVD process optimization for environmentally-conscious manufacturing.
| Autor: | Lu, Guangquan, Bora, Monalisa |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Aug97, Vol. 10 Issue 3, p390. 9p. 7 Black and White Photographs, 2 Diagrams, 6 Graphs. |
| Databáze: | Business Source Ultimate |
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