Autor:	Nishihashi, Tsutomu, Kashimoto, Kazuhiro, Fujiyama, Junki, Sakurada, Yuzo, Shibata, Takeshi, Suguro, Kyoichi, Sugihara, Kazuyoshi, Okumura, Katsuya, Gotou, Tadashi, Saji, Nobuhito, Tsunoda, Michio
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. Nov2002, Vol. 15 Issue 4, p464. 6p. 13 Black and White Photographs, 7 Diagrams, 1 Chart, 2 Graphs.
Databáze:	Business Source Ultimate
Externí odkaz:	Zobrazit plný text záznamu