Estimating Lateral Straggling of Indium Implanted Into Crystalline Silicon.
| Autor: | Suzuki, Kunihiro, Sudo, Ritsuo, Tashiro, Hiroko |
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| Zdroj: | IEEE Transactions on Electron Devices. Jul2002, Vol. 49 Issue 7, p1312. 3p. 6 Graphs. |
| Databáze: | Business Source Ultimate |
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