Test Structures for Evaluating String Phase Shift Lithography.
| Autor: | Ashton, Robert A., Kane, Brittin C., Blatchford, James W., Shuttleworth, David M. |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. May2002, Vol. 15 Issue 2, p195. 6p. 4 Black and White Photographs, 9 Diagrams, 5 Graphs. |
| Databáze: | Business Source Ultimate |
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