Study of SILC and Interface Trap Generation Due to High Field Stressing and Its Operating Temperature Dependence in 2.2 nm Gate Dielectrics.

Autor: Borse, D. G., Vaidya, S. J., Chandorkar, Arun N.
Zdroj: IEEE Transactions on Electron Devices. Apr2002, Vol. 49 Issue 4, p699. 3p. 2 Charts, 5 Graphs.
Databáze: Business Source Ultimate