Study of SILC and Interface Trap Generation Due to High Field Stressing and Its Operating Temperature Dependence in 2.2 nm Gate Dielectrics.
Autor: | Borse, D. G., Vaidya, S. J., Chandorkar, Arun N. |
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Zdroj: | IEEE Transactions on Electron Devices. Apr2002, Vol. 49 Issue 4, p699. 3p. 2 Charts, 5 Graphs. |
Databáze: | Business Source Ultimate |
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