Chemical Mechanical Polishing in Elastic Contact and Partial Hydrodynamic Lubrication: Modeling and Experiments.

Autor: Tsai, Hung-Jung1 (AUTHOR) hjtsai@wfu.edu.tw, Huang, Pay-Yau1 (AUTHOR), Tsai, Hung-Cheng2 (AUTHOR), Chiu, Shun-Jung1 (AUTHOR)
Zdroj: Materials & Manufacturing Processes. Feb2011, Vol. 26 Issue 2, p319-324. 6p. 2 Black and White Photographs, 1 Diagram, 4 Graphs.
Databáze: Business Source Ultimate
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