PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS.
| Autor: | Polla, Dennis L., Francis, Lorraine F. |
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| Zdroj: | Annual Review of Materials Science. 1998, Vol. 28 Issue 1, p563. 35p. 10 Black and White Photographs, 8 Diagrams, 2 Charts, 2 Graphs. |
| Databáze: | Business Source Ultimate |
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