Dependence of cathode sputtering rate on the current in a glow discharge.
| Autor: | Orlinov, V., Mladenov, G. |
|---|---|
| Zdroj: | International Journal of Electronics. Jul69, Vol. 27 Issue 1, p65. 9p. 2 Diagrams, 7 Graphs. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|