Dependence of cathode sputtering rate on the current in a glow discharge.
Autor: | Orlinov, V., Mladenov, G. |
---|---|
Zdroj: | International Journal of Electronics. Jul69, Vol. 27 Issue 1, p65. 9p. 2 Diagrams, 7 Graphs. |
Databáze: | Business Source Ultimate |
Externí odkaz: |