Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge.
Autor: | Orlinov, V., Goranchev, B., Kourtev, J. |
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Zdroj: | International Journal of Electronics. Apr74, Vol. 36 Issue 4, p431. 9p. 1 Chart, 3 Graphs. |
Databáze: | Business Source Ultimate |
Externí odkaz: |