Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge.

Autor: Orlinov, V., Goranchev, B., Kourtev, J.
Zdroj: International Journal of Electronics. Apr74, Vol. 36 Issue 4, p431. 9p. 1 Chart, 3 Graphs.
Databáze: Business Source Ultimate