Influence of the heat transfer from the cathode on the dependence of cathode sputtering rate on current and pressure in a glow discharge.
| Autor: | Orlinov, V., Mladenov, G., Goranchev, B. |
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| Zdroj: | International Journal of Electronics. Mar1971, Vol. 30 Issue 3, p233. 11p. 11 Graphs. |
| Databáze: | Business Source Ultimate |
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