A System Model for Feedback Control and Analysis of Yield: A Multistep Process Model of....
| Autor: | Rietman, Edward A., Whitlock, Stephen A., Beachy, Milton, Roy, Andrew, Willingham, Timothy L. |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Feb2001, Vol. 14 Issue 1, p32. 16p. 4 Diagrams, 2 Charts, 5 Graphs. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|