Pressure indicating film characterization of wafer-to-wafer bonding.
| Autor: | Kwan-yu Lai, Stark, Jefferey G. |
|---|---|
| Zdroj: | Solid State Technology. Aug2009, Vol. 52 Issue 8, p18-20. 3p. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|
| Autor: | Kwan-yu Lai, Stark, Jefferey G. |
|---|---|
| Zdroj: | Solid State Technology. Aug2009, Vol. 52 Issue 8, p18-20. 3p. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|