Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication.
| Autor: | Costner, Elizabeth A.1 costner@che.utexas.edu, Lin, Michael W.1 mikeyl@mail.utexas.edu, Wei-Lun Jen1 kane.jen@mail.utexas.edu, Willson, C. Grant1 willson@che.utexas.edu |
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| Zdroj: | Annual Review of Materials Research. 2009, Vol. 39 Issue 1, p155-180. 26p. |
| Databáze: | Business Source Ultimate |
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