MICROBOLOMETERS FABRICATED WITH SURFACE MICROMACHINING WITH a-Si-Ge:: H THERMO-SENSING FILMS.
| Autor: | MORENO, MARIO1 mmoreno@inaoep.mx, KOSAREV, ANDREY1 akosarev@inaoep.mx, TORRES, ALFONSO1 atorres@inaoep.mx, AMBROSIO, ROBERTO2 rambrosi@uacj.mx |
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| Zdroj: | International Journal of High Speed Electronics & Systems. Dec2008, Vol. 18 Issue 4, p1045-1054. 10p. 4 Diagrams, 2 Charts, 4 Graphs. |
| Databáze: | Business Source Ultimate |
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