Reliability of Strained-Si Devices With Post-Oxide-Deposition Strain Introduction.
| Autor: | Shickova, Adelina1,2 adelina.shickova@imec.be, Verheyen, Peter1, Eneman, Geert1,2,3, Degraeve, Robin1, Simoen, Eddy1, Favia, Paola1, Klenov, Dmitri O.4, Andrés, Enrique San, Kaczer, Ben1, Jurczak, Malgorzata1, Absil, Philippe1, Maes, Herman E.1,2, Groeseneken, Guido1,2 |
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| Zdroj: | IEEE Transactions on Electron Devices. Dec2008, Vol. 55 Issue 12, p3432-3441. 10p. |
| Databáze: | Business Source Ultimate |
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