High-Efficiency PFC Abatement System Utilizing Plasma Decomposition and Ca(OH)2/CaO Immobilization.
| Autor: | Suzuki, Katsumasa1 Katsumasa.Suzuki@tn-sanso.co.jp, Ishihara, Yoshio2, Sakoda, Kaoru2, Shirai, Yasuyuki3, Teramoto, Akinobu3, Hirayama, Masaki3, Ohmi, Tadahiro3, Watanabe, Takayuki4, Ito, Takashi5 |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Nov2008, Vol. 21 Issue 4, p668-675. 8p. 1 Chart, 11 Graphs. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|