Investigation of Metallized Source/Drain Extension for High-Performance Strained NMOSFETs.

Autor: Tzu-Juei Wang1, Chih-Hsin Ko2, Hong-Nien Lin2, Shoou-Jinn Chang1 changsj@mail.ncku.edu.tw, Sap-Lein Wu3, Ta-Ming Kuan2, Wen-Chin Lee2
Zdroj: IEEE Transactions on Electron Devices. Nov2008, Vol. 55 Issue 11, p3221-3226. 6p.
Databáze: Business Source Ultimate