Classification of Defect Clusters on Semiconductor Wafers Via the Hough Transformation.
| Autor: | White, Jr., K. Preston1, Kundu, Bijoy2, Mastrangelo, Christina M.3 |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. May2008, Vol. 21 Issue 2, p272-278. 7p. 9 Graphs. |
| Databáze: | Business Source Ultimate |
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