Surface Hydrogen Incorporation and Profile Broadening Caused by Sheath Expansion in Hydrogen Plasma Immersion Ion Implantation.
| Autor: | Fan, Zhineng, Zeng, Xuchu |
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| Zdroj: | IEEE Transactions on Plasma Science. Apr2000, Vol. 28 Issue 2, p371. 5p. |
| Databáze: | Business Source Ultimate |
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