Inverse Modeling of Two-Dimensional MOSFET Dopant Profile via Capacitance of the Source/Drain Gated Diode.

Autor: Chiang, C. Y. T., Yeow, Y. T.
Zdroj: IEEE Transactions on Electron Devices. Jul2000, Vol. 47 Issue 7, p1385. 8p. 2 Diagrams, 1 Chart, 14 Graphs.
Databáze: Business Source Ultimate