Compact and Comprehensive Database for Ion-Implanted As Profile.
| Autor: | Suzuki, Kunihiro, Sudo, Ritsuo |
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| Zdroj: | IEEE Transactions on Electron Devices. Jan2000, Vol. 47 Issue 1, p44. 6p. 4 Black and White Photographs, 1 Chart, 13 Graphs. |
| Databáze: | Business Source Ultimate |
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