The effect of deterministic spatial variations in retrograde well implants on shallow trench...
| Autor: | Kapila, Dixit, Jain, Amitabh |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Nov99, Vol. 12 Issue 4, p457. 5p. 5 Diagrams, 6 Graphs. |
| Databáze: | Business Source Ultimate |
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