Mechanical Stress and Defect Formation in Device Processing: Validity of the Numerical Models for Mechanical Stress Calculation.
| Autor: | Polignano, Maria Luisa1 marialuisa.polignano@st.com, Carnevale, Gianpietro P.1, Mica, Isabella1, Pastore, Carine2 |
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| Zdroj: | IEEE Transactions on Electron Devices. May2007, Vol. 54 Issue 5, p1108-1114. 7p. 4 Black and White Photographs, 2 Charts, 3 Graphs. |
| Databáze: | Business Source Ultimate |
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