Simultaneous double-sided deposition of HTS films on 3-inch wafers by ICM-sputtering.
| Autor: | Geerk, J., Ratzel, F. |
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| Zdroj: | IEEE Transactions on Applied Superconductivity. Jun99 Part 2 of 3, Vol. 9 Issue 2, p1543. 4p. 1 Diagram, 5 Graphs. |
| Databáze: | Business Source Ultimate |
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