Quantifying Variability of Batching Equipment Using Effective Process Times.
| Autor: | Jacobs, J. H.1 johan.jacobs-jacj@asml.com, van Bakel, P. P.2 p.p.van-bakel@tpgpost.nl, Etman, L. F. P.3 l.f.p.etman@tue.nl, Rooda, J. E.3 j.e.rooda@tue.nl |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. May2006, Vol. 19 Issue 2, p269-275. 7p. 4 Black and White Photographs, 5 Diagrams, 3 Charts, 1 Graph. |
| Databáze: | Business Source Ultimate |
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