Recent progress in quantum and nonlinear optical lithography.

Autor: Boyd, Robert W.1 boyd@optics.rochester.edu, Bentley, Sean J.2
Zdroj: Journal of Modern Optics. 3/20/2006, Vol. 53 Issue 5/6, p713-718. 6p. 1 Black and White Photograph, 3 Diagrams.
Databáze: Business Source Ultimate