Novel Algorithms for Placement of Rectangular Covers for Mask Inspection in Advanced Lithography and Other VLSI Design Applications.
| Autor: | Chakraborty, Kanad1 kanadc@agere.com, Lvov, Alexey2 lvov@us.ibm.com, Mukherjee, Maharaj3 mmukherj@us.ibm.com |
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| Zdroj: | IEEE Transactions on Computer-Aided Design of Integrated Circuits & Systems. Jan2006, Vol. 25 Issue 1, p79-91. 13p. |
| Databáze: | Business Source Ultimate |
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