Notching Effect on Metal Etch: A Very Simple Predictive Model.
| Autor: | Garozzo, Giuseppe1 giuseppe.garozzo@st.com, Beffumo, Fabio1, la Magna, Antonino2 |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Aug2005, Vol. 18 Issue 3, p355-358. 4p. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|