Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing.
| Autor: | Wang, Tianhui1 (AUTHOR), Baek, Jaeseung2 (AUTHOR) jbaek@nmu.edu, Jeong, Myong-Kee1 (AUTHOR) mjeong@soe.rutgers.edu, Seo, Seongho3 (AUTHOR), Choi, Jaekyung3 (AUTHOR) |
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| Zdroj: | International Journal of Production Research. Oct2024, Vol. 62 Issue 19, p7114-7129. 16p. |
| Databáze: | Business Source Ultimate |
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