Detecting profile excursions using spectroscopic ellipsometry.
| Autor: | Yeh, Mike, Shu-Ping Fang, Bo-Jau Tsau, C. C. Huang, Lin, Benjamin, Fu, Steven, Chen, Jay, Freed, Regina, Dziura, Ted, Slessor, Mike |
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| Zdroj: | Solid State Technology. Jul2005, Vol. 48 Issue 7, p6-6. 1/3p. |
| Databáze: | Business Source Ultimate |
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