Enabling the Use of High-Precision Glass Wafers in a Conventional Si Fab.
| Autor: | Zhang, Jay1 (AUTHOR) zhangjj@corning.com, Ng, Chee-Hau2 (AUTHOR) chee_hau_ng@umc.com, Kouassi, Sebastien3 (AUTHOR) skouassi@psemi.com |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Aug2023, Vol. 36 Issue 3, p340-344. 5p. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
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