Surface science issues in plasma etching.
| Autor: | Oehrlein, G. S., Doemling, M. F., Kastenmeier, B. E. E., Matsuo, P. J., Rueger, N. R., Schaepkens, M., Standaert, T. E. F. M. |
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| Zdroj: | IBM Journal of Research & Development. Jan-Mar99, Vol. 43 Issue 1/2, p181. 17p. 6 Diagrams, 13 Graphs. |
| Databáze: | Business Source Ultimate |
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