Inverse model-based real-time control for temperature uniformity of RTCVD.
| Autor: | Theodoropoulou, Artemis, Zafiriou, Evanghelos |
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| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Feb99, Vol. 12 Issue 1, p87. 15p. 3 Black and White Photographs, 5 Diagrams, 17 Graphs. |
| Databáze: | Business Source Ultimate |
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