Influence of ion/atom arrival ratio on structure and optical properties of AlN films by ion beam assisted deposition.
| Autor: | Meng, Jian-ping1,2, Fu, Zhi-qiang2 fuzq@cugb.edu.cn, Liu, Xiao-peng1, Yue, Wen2, Wang, Cheng-biao2 |
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| Zdroj: | Applied Surface Science. Oct2014, Vol. 317, p760-764. 5p. |
| Databáze: | Academic Search Ultimate |
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