Al/TixW1-x metal/diffusion-barrier bilayers: Interfacial reaction pathways and kinetics during...
| Autor: | Bergstrom, D.B., Petrov, I., Greene, J. E. |
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| Zdroj: | Journal of Applied Physics. 9/1/1997, Vol. 82 Issue 5, p2312. 11p. 9 Black and White Photographs, 1 Chart, 14 Graphs. |
| Databáze: | Academic Search Ultimate |
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