The physiochemical properties of TiOxNy films with controlled oxygen partial pressure

Autor: Jung, Min J. minjae21c@hanmail.net, Nam, Kyung H.1, Chung, Yun M.1, Boo, Jin H.1, Han, Jeon G.1
Zdroj: Surface & Coatings Technology. Jul2003, Vol. 171 Issue 1-3, p71. 4p.
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