Epitaxial cobalt silicide formation using a Co/TiSix bilayer on Si (1 0 0) by sputtering
| Autor: | Jeong, Jin Jung1, Lim, Jongmin1, Lee, Chongmu cmlee@inha.ac.kr |
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| Zdroj: | Surface & Coatings Technology. Jul2003, Vol. 171 Issue 1-3, p6. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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