Monte Carlo simulations on large-area deposition of amorphous silicon by hot-wire CVD
| Autor: | Pflüger, Andrea1, Schröder, Bernd1 bs@rhrk.uni-kl.de, Bart, Hans-Jörg2 |
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| Zdroj: | Thin Solid Films. Apr2003, Vol. 430 Issue 1/2, p73. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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