Ultra-thin engraved 3D taper structure in a crystalline material using FIB.
| Autor: | Fang, L.1 li.fang@lpn.cnrs.fr, Gogneau, N.1, Oudar, J.L.1, Bourhis, E.1, Gierak, J.1 |
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| Zdroj: | Microelectronic Engineering. Nov2014, Vol. 129, p12-16. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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