Influence of negative bias voltage and deposition temperature on microstructure and properties of superhard TiB2 coatings deposited by high power impulse magnetron sputtering.

Autor: Zhang, Teng Fei1,2, Gan, Bin2, Park, Seong-mo1,2, Wang, Qi Min3, Kim, Kwang Ho1,2,4 kwhokim@pusan.ac.kr
Zdroj: Surface & Coatings Technology. Aug2014, Vol. 253, p115-122. 8p.
Databáze: Academic Search Ultimate