Effect of a r.f. antenna on carbon nitride films deposited by ionized r.f. magnetron sputtering
| Autor: | Angleraud, B. benoit.angleraud@cnrs-imn.fr, Mubumbila, N.1, Tessier, P.Y.1 |
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| Zdroj: | Diamond & Related Materials. Mar2003, Vol. 12 Issue 3-7, p1093. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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