Structural properties of the epitaxial (SiC)(AlN) solid solution films fabricated by magnetron sputtering of SiC-Al composite targets.
| Autor: | Ramazanov, Sh. ramazanv@mail.ru, Kurbanov, M., Safaraliev, G., Bilalov, B., Kargin, N., Gusev, A. |
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| Zdroj: | Technical Physics Letters. Apr2014, Vol. 40 Issue 4, p300-302. 3p. |
| Databáze: | Academic Search Ultimate |
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