Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses.
| Autor: | Vigil, Kyle1 klvigil@bu.edu, Yang Lu2, Yurt, Abdulkadir3, Cilingiroglu, Tenzile Berkin4, Bifano, Thomas G.2, Ünlü, M. Selim1,4, Goldberg, Bennett B.1,4 |
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| Zdroj: | Electronic Device Failure Analysis. May2014, Vol. 16 Issue 2, p26-32. 7p. |
| Databáze: | Academic Search Ultimate |
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