The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films.
| Autor: | Ying-Chung Chen1, Wei-Tsai Chang1, Kuo-Sheng Kao2, Chun-Hung Yang1, Chien-Chuan Cheng3 chengccc@dlit.edu.tw |
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| Zdroj: | Journal of Nanomaterials. 2013, p1-8. 8p. |
| Databáze: | Academic Search Ultimate |
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