The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films.
Autor: | Ying-Chung Chen1, Wei-Tsai Chang1, Kuo-Sheng Kao2, Chun-Hung Yang1, Chien-Chuan Cheng3 chengccc@dlit.edu.tw |
---|---|
Zdroj: | Journal of Nanomaterials. 2013, p1-8. 8p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |