Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering.
| Autor: | Choudhary, R. K.1 rupeshkr@barc.gov.in, Mishra, P.1, Biswas, A.2, Bidaye, A. C.1 |
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| Zdroj: | ISRN Materials Science. 2013, p1-5. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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