Artificial sub-μm magnetic patterning by He+ ion bombardment through a mask fabricated by Ultraviolet NanoImprint Lithography (UV-NIL).
Autor: | Schmidt, Christoph1, Smolarczyk, Marek2, Gomer, Ludmilla2, Hillmer, Hartmut2, Ehresmann, Arno1 ehresmann@physik.uni-kassel.de |
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Zdroj: | Nuclear Instruments & Methods in Physics Research Section B. Mar2014, Vol. 322, p59-62. 4p. |
Databáze: | Academic Search Ultimate |
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