Advanced chemical model for analysis of Cz and DS Si-crystal growth.
| Autor: | Vorob’ev, A.N.1 andrei.vorobiev@str-soft.com, Sid’ko, A.P.1, Kalaev, V.V.1 |
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| Zdroj: | Journal of Crystal Growth. Jan2014, Vol. 386, p226-234. 9p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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