Luminescent silicon nanocrystal dots fabricated by SiCl4/H2 RF plasma-enhanced chemical vapor deposition

Autor: Shirai, Hajime shirai@fms.saitama-u.ac.jp, Tsukamoto, Toru1, Kurosaki, Ken-ichi1
Zdroj: Physica E. Mar2003, Vol. 16 Issue 3/4, p388. 7p.
Databáze: Academic Search Ultimate