Arc plasma jet cleaning of the silicon surface before CoSi[sub 2] /Si contact formation.
| Autor: | Pavlov, G. Ya., Pugachevich, V. P., Gromov, D. G., Kudryashova, E. B. |
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| Zdroj: | Applied Physics A: Materials Science & Processing. 1996, Vol. 63 Issue 1, p9. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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